INTEGRATION OF ENZYME-IMMOBILIZED COLUMN WITH ELECTROCHEMICAL FLOW CELL USING MICROMACHINING TECHNIQUES FOR A GLUCOSE DETECTION SYSTEM

A miniaturized enzyme column integrated with a microelectrochemical flow cell was developed for the flow injection detection of glucose. The device consisted of a glucose oxidase-immobilized column and a flow cell with a microelectrode, which were fabricated and integrated on a silicon wafer by micromachining techniques such as photolithography, anisotropic etching, thermal oxidation, vacuum evaporation, and anodic bonding. A silicon wafer was photolithographically developed and anisotropically etched to form a V-shaped groove 1 m long, 100 mum wide, and 70 mum deep. A glass plate with thin-film electrodes was anodically bonded to the silicon before enzyme immobilization. The flow injection system-gives a linear relationship between peak current and glucose concentration in the range of 1-25 mM.