PREPARATION AND CHARACTERIZATION OF SUPERCONDUCTING Y-BA-CU-O FILMS BY THE MOCVD TECHNIQUE

被引:24
作者
OHNISHI, H [1 ]
KUSAKABE, Y [1 ]
KOBAYASHI, M [1 ]
HOSHINOUCHI, S [1 ]
HARIMA, H [1 ]
TACHIBANA, K [1 ]
机构
[1] KYOTO INST TECHNOL,DEPT ELECTR & INFORMAT SCI,SAKYO KU,KYOTO 606,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 06期
关键词
As-grown; Cvd; Microstructure; Superconductor; Surface morphology; Thin films; Ybacuo;
D O I
10.1143/JJAP.29.1070
中图分类号
O59 [应用物理学];
学科分类号
摘要
Superconducting Y–Ba–Cu–O thin films were obtained by the MOCVD technique on MgO(100) substrates at 715°C without postannealing. β-diketonate chelates were used as source metal organic complexes. This paper describes the film characterizations of electrical resistivity, composition, surface morphology and microstructure. Superconducting films were composed of a dense matrix and dispersed particles. The Y–Ba–Cu composition of the matrix was close to the 1:2:3 superconducting phase, while the particles were mainly composed of CuO. The highest zero-resistant temperature obtained in this experiment was 85 K. The film was highly oriented with the c-axis normal to the substrate. The lattice constant of the film was 11.68 Å. © 1990 The Japan Society of Applied Physics.
引用
收藏
页码:1070 / 1075
页数:6
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