LASER EXPERIMENTS IN A SCANNING ELECTRON-MICROSCOPE

In order to increase the information content of electron microscopic investigations a scanning electron microscope was combined with a pulsed Nd-glass laser in both the free running and the Q-switch mode. The equipment allows an in situ observation of melting, sintering and evaporation processes as well as of crack generation and growth at target surfaces. This article describes evaporation experiments for laser PVD of HTSC layers, Langmuir probe measurements in the corresponding plasma and crack processes by thermal shock loading in the SEM.