COATING TECHNOLOGY BASED ON THE VACUUM-ARC - A REVIEW

被引:108
作者
SANDERS, DM [1 ]
BOERCKER, DB [1 ]
FALABELLA, S [1 ]
机构
[1] KMI ENERGY SERV INC,LIVERMORE,CA 94550
关键词
D O I
10.1109/27.61499
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
An overview of the current state of vacuum-arc-based coating technology is presented, with particular emphasis on defining those areas where further investigation would reap the greatest benefits. Particular attention is given to the 'continuous' cathodic arc, which is currently the best understood approach and which has been most successfully adapted for large-scale commercial coating in the United States. It is noted that the greatest promise of ion-based coating technology based on the vacuum arc is the potential for increased control over the coating process. Unlike the case for neutral coating atoms, the presence of a charge on coating ions gives a 'handle' to exert forces on them using electrostatic fields. One can in theory control the trajectory of these ions between the coating source and part to be coated. One can also control the energy with which they impact the substrate. It may even be possible to control the extent of their reactivity.
引用
收藏
页码:883 / 894
页数:12
相关论文
共 103 条
[61]  
Maslov A. I., 1985, PRIB TEKH EKSP, P146
[62]   COMPUTER-SIMULATION OF THE DYNAMICS OF PLASMA - SURFACE INTERACTIONS IN VACUUM-ARC CATHODE SPOTS [J].
MITTERAUER, J ;
TILL, P .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1987, 15 (05) :488-501
[63]  
MOLL E, 1984, Patent No. 4448802
[64]  
Morozov A. I., 1966, SOV PHYS DOKL, V10, P775
[65]  
MOROZOV AI, 1980, REV PLASMA PHYSICS, V8
[66]  
MULLER KH, 1987, J VAC SCI TECHNOL A, V5, P2161, DOI 10.1116/1.574945
[67]  
MULLER KH, 1986, J VAC SCI TECHNOL A, V4, P184, DOI 10.1116/1.573468
[68]   PROPERTIES OF CEO2 THIN-FILMS PREPARED BY OXYGEN-ION-ASSISTED DEPOSITION [J].
NETTERFIELD, RP ;
SAINTY, WG ;
MARTIN, PJ ;
SIE, SH .
APPLIED OPTICS, 1985, 24 (14) :2267-2272
[69]  
Palatnik L. S., 1986, Physics and Chemistry of Materials Treatment, V20, P240
[70]  
Popov D. N., 1986, Bulgarian Journal of Physics, V13, P470