PRECISION FLIP-CHIP SOLDER BUMP INTERCONNECTS FOR OPTICAL PACKAGING

被引:6
作者
IMLER, WR
SCHOLZ, KD
COBARRUVIAZ, M
NAGESH, VK
CHAO, CC
HAITZ, R
机构
[1] HEWLETT PACKARD CO,CIRCUIT TECHNOL GRP,PALO ALTO,CA 94304
[2] HEWLETT PACKARD CO,CALIF PERSONAL COMP DIV,SUNNYVALE,CA 94086
[3] HEWLETT PACKARD CO,COMPONENTS GRP,SAN JOSE,CA 95131
来源
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY | 1992年 / 15卷 / 06期
关键词
D O I
10.1109/33.206920
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Solder bump flip-chip technology is particularly well suited to the packaging of classes of devices, such as fine pitch light emitting diode (LED) array electrophotographic print heads, which place premiums on precision alignment, high electrical interconnect density, close die placement, and low cost. The manufacturing feasibility of such an array was investigated, with particular emphasis on the quality of surface tension induced self-alignment inherent with solder bump bonding. An array of surface emitting LED diode array chips was fabricated employing 75-mum diameter solder bumps on 156-mum pitch. The chips were spaced 15 mum edge-to-edge, face down, on a glass substrate patterned with thin film metallization. Chip-to-substrate alignment errors in the X - Y plane were found to be under 1.5 mum with a standard deviation of under 1.0 mum, well below the 10-15-mum error typical of the standard mechanical alignment method. Improvements in light output uniformity and a reduction in scattered light over arrays manufactured with conventional die placement and wire bonding were also observed.
引用
收藏
页码:977 / 982
页数:6
相关论文
共 5 条
[1]   OPTOELECTRONIC COMPONENT ARRAYS FOR OPTICAL INTERCONNECTION OF CIRCUITS AND SUBSYSTEMS [J].
GOODWIN, MJ ;
MOSELEY, AJ ;
KEARLEY, MQ ;
MORRIS, RC ;
KIRKBY, CJG ;
THOMPSON, J ;
GOODFELLOW, RC ;
BENNION, I .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1991, 9 (12) :1639-1645
[2]  
HATADA K, 1989, SEVENTH IEEE/CHMT INTERNATIONAL ELECTRONIC MANUFACTURING TECHNOLOGY SYMPOSIUM, P230, DOI 10.1109/EMTS.1989.68980
[3]   LED ARRAY MODULES BY NEW TECHNOLOGY MICROBUMP BONDING METHOD [J].
HATADA, K ;
FUJIMOTO, H ;
OCHI, T ;
ISHIDA, Y .
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1990, 13 (03) :521-527
[4]  
LAU J, 1989, SEVENTH IEEE/CHMT INTERNATIONAL ELECTRONIC MANUFACTURING TECHNOLOGY SYMPOSIUM, P48, DOI 10.1109/EMTS.1989.68951
[5]  
NATHER H, 1988, 4TH P INT C ADV NON, P396