GALLIUM CLUSTERS FROM A LIQUID-METAL ION-SOURCE

被引：26

作者：

BARR, DL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583859

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：184 / 189

页数：6

共 9 条

[1] BARR DL, 1983, UNPUB 30TH FIELD EM
[2] MECHANISM OF LIQUID-METAL ELECTRON AND ION SOURCES
GOMER, R
[J]. APPLIED PHYSICS, 1979, 19 (04): : 365 - 375
[3] MASS-TRANSPORT IN LIQUID GALLIUM ION-BEAM SOURCES
MAIR, GLR
VONENGEL, A
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (09) : 1721 - 1727
[4] HIGH-INTENSITY SCANNING ION PROBE WITH SUBMICROMETER SPOT SIZE
SELIGER, RL
WARD, JW
WANG, V
KUBENA, RL
[J]. APPLIED PHYSICS LETTERS, 1979, 34 (05) : 310 - 312
[5] DISINTEGRATION OF WATER DROPS IN ELECTRIC FIELD
TAYLOR, G
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1964, 280 (1380) : 383 - +
[6] LIQUID GOLD ION-SOURCE
WAGNER, A
HALL, TM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1871 - 1874
[7] GERMANIUM SELENIDE - A RESIST FOR LOW-ENERGY ION-BEAM LITHOGRAPHY
WAGNER, A
BARR, D
VENKATESAN, T
CRANE, WS
LAMBERTI, VE
TAI, KL
VADIMSKY, RG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1363 - 1367
[8] THE HYDRODYNAMICS OF LIQUID-METAL ION SOURCES
WAGNER, A
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (05) : 440 - 442
[9] DROPLET EMISSION IN LIQUID-METAL ION SOURCES
WAGNER, A
VENKATESAN, T
PETROFF, PM
BARR, D
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1186 - 1189