DEVELOPMENT OF A COMPACT ELECTRON-BEAM ION-SOURCE COOLED WITH LIQUID-NITROGEN

被引:38
作者
OKUNO, K
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 06期
关键词
D O I
10.1143/JJAP.28.1124
中图分类号
O59 [应用物理学];
学科分类号
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页码:1124 / 1131
页数:8
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