RECOIL MIXING IN HIGH-FLUENCE ION-IMPLANTATION

被引：35

作者：

LITTMARK, U ^{[1
]}

HOFER, WO ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS | 1980年 / 170卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(80)91006-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：177 / 181

页数：5

共 24 条

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[7] COLLINS RA, 1976, RAD EFFECTS, V28, P123
[8] DEARNALEY G, 1974, ANN REV MAT SCI, V4
[9] DIRECT COLLECTION OF SOME METAL IONS IN AN ELECTROMAGNETIC ISOTOPE SEPARATOR AND RELATED SURFACE EFFECTS
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