ERROR REDUCTION IN THE ELLIPSOMETRIC MEASUREMENT ON THIN-FILMS

被引：11

作者：

HO, JH

LEE, CL

LEI, TF

机构：

[1] Natl Chiao Tung Univ, Hsinchu, Taiwan, Natl Chiao Tung Univ, Hsinchu, Taiwan

来源：

SOLID-STATE ELECTRONICS | 1988年 / 31卷 / 08期

关键词：

DOUBLE-LAYER MODEL - ELLIPSOMETRIC MEASUREMENT - ERROR REDUCTION - INDEX PROFILE - SINGLE-LAYER MODEL - ULTRA THIN FILM;

D O I：

10.1016/0038-1101(88)90432-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

(Edited Abstract)

引用

页码：1321 / 1326

页数：6

共 22 条

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[3]

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[9]

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[10]

Ho J., UNPUB

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