SPATIAL AND TEMPORAL EMISSION-SPECTROSCOPY OF A RADIO-FREQUENCY CAPACITIVELY COUPLED LOW-PRESSURE OXYGEN DISCHARGE

被引：10

作者：

BARNES, RM

WINSLOW, RJ

机构：

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1978年 / 82卷 / 17期

关键词：

D O I：

10.1021/j100506a003

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：1869 / 1875

页数：7

相关论文

共 7 条

[1] SPATIAL DISTRIBUTION OF ELECTRON DENSITY AND ELECTRIC FIELD STRENGTH IN A HIGH-FREQUENCY DISCHARGE . CRITERIA FOR SIMILARITY
BELL, AT
[J]. INDUSTRIAL & ENGINEERING CHEMISTRY FUNDAMENTALS, 1970, 9 (01): : 160 - &
[2] DISSOCIATION OF OXYGEN IN A RADIOFREQUENCY ELECTRICAL DISCHARGE
BELL, AT
KWONG, K
[J]. AICHE JOURNAL, 1972, 18 (05) : 990 - &
[3] BROWN SC, 1956, HDB PHYSIK, V22, P531
[4] SPECTROSCOPIC STUDY OF RADIOFREQUENCY OXYGEN PLASMA STRIPPING OF NEGATIVE PHOTORESISTS .1. ULTRAVIOLET-SPECTRUM
DEGENKOLB, EO
MOGAB, CJ
GOLDRICK, MR
GRIFFITHS, JE
[J]. APPLIED SPECTROSCOPY, 1976, 30 (05) : 520 - 527
[5] HARRIES WL, 1950, P R SOC LONDON A, V222, P490
[6] OPTIMIZATION OF NONTHERMAL PLASMAS FOR PLASMA-CHEMICAL APPLICATIONS
MULLER, KG
[J]. CHEMIE INGENIEUR TECHNIK, 1973, 45 (03) : 122 - 130
[7] ELECTRON ENERGY DISTRIBUTIONS IN PLASMAS .4. OXYGEN AND NITROGEN
THOMPSON, JB
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1961, 262 (1310) : 503 - +