VOLATILITY OF METAL BETA-DIKETONATES FOR CHEMICAL VAPOR-DEPOSITION OF OXIDE SUPERCONDUCTORS

被引：41

作者：

OZAWA, T

机构：

[1] Tsukuba Research Center, Daicel Chemical Industries, Ltd., Tsukuba, Ibaraki

来源：

THERMOCHIMICA ACTA | 1991年 / 174卷

关键词：

D O I：

10.1016/0040-6031(91)80160-K

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

For chemical vapor deposition, in which vapors of metallic organic compounds are introduced and decomposed over a substrate to form thin films, data on the volatility of the compounds are of essential importance as basic data. Thermal analysis is a useful tool for observing volatility. The application of thermal analysis, and the results for metal beta-diketonates with respect to chemical vapor deposition of oxide superconductors are summarized. Problems to be solved are also pointed out.

引用

页码：185 / 199

页数：15

共 58 条

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