CHARACTERIZATION AND USE OF A NOVEL OPTICAL POSITION SENSOR FOR MICROPOSITION CONTROL OF A LINEAR MOTOR

The performance of an optical reflective position sensor is evaluated as the position feedback element in the microposition control of a linear electromagnetic motor. The open loop position sensor characteristics are first measured to determine the analog controller design parameters. The performance of the controller, evaluated using an integrated Michelson interferometer, measures the control loop bidirectional accuracy, hysteresis, long-term stability, and position linearity. Compensation of the small nonlinearity measured required linearization of the input command signal and a practical application is demonstrated with a constant velocity scan of one of the interferometer mirrors. A final result is the submicron square wave modulation of the interferometer output with its scan mirror under closed-loop control using feedback from the reflective position sensor.