A CAPACITANCE DISPLACEMENT SENSOR WITH ELASTIC DIAPHRAGM

被引：8

作者：

ROTH, P

GMELIN, E

机构：

[1] Max-Planck-Institut für Festkörperforschung, D-7000 Stuttgart 80

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 03期

关键词：

D O I：

10.1063/1.1143165

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed a capacitance displacement sensor based on the elastic deformation of a 150-mu-m thick diaphragm made up of Cu0.98Be0.02. Displacements up to 50-mu-m can be detected. The resolution is about 0.1 nm. The time dependence of the dilatation of a relaxor-ferroelectric (Sr0.61Ba0.39)Nb2O6 single crystal after removing an electric field is investigated using this sensor.

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页码：2051 / 2053

页数：3

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