GaInAsP/InP buried-heterostructure (BH) optical intensity modulators have been fabricated by the use of Fe-doped semi-insulating InP burying layers. The reduction of a parasitic capacitance due to the semi-insulating burying layers realised a wide modulation bandwidth of 11 multiplied by (times) 2 GHz. At a wavelength of 1 multiplied by (times) 53 mu m, an attenuation ratio of 20 db at 26 degree C was achieved with an applied voltage of minus 8 multiplied by (times) 5 v.