INTEGRATED OPTICAL RING-RESONATOR WITH MICROMECHANICAL DIAPHRAGM FOR PRESSURE SENSING

被引：59

作者：

DEBRABANDER, GN ^{[1
]}

BOYD, JT ^{[1
]}

BEHEIM, G ^{[1
]}

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1994年 / 6卷 / 05期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1109/68.285575

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An optical pressure sensor has been fabricated which uses an integrated-optical ring resonator to measure the strain induced in a micromachined silicon diaphragm. A silicon substrate is etched from the side opposite the silicon oxynitride optical waveguides to produce a rectangular diaphragm whose long edge lies underneath a straight section in the ring. Pressure-induced changes in the resonant frequency of the ring are measured using a frequency swept laser diode. A linear response to pressure is observed for the TM mode with a sensitivity of 0.0094 rad/kPa. This pressure sensor is rugged, is amenable to batch fabrication, and it provides a link-insensitive readout.

引用

页码：671 / 673

页数：3

共 13 条

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