INTEGRATED OPTIC PRESSURE SENSOR ON SILICON SUBSTRATE

[1] [Anonymous], THEORY PLATES SHELLS

[2] Auld B., 1973, ACOUSTIC FIELDS WAVE, V1

[3] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[4] INTEGRATED-OPTIC FLUID SENSOR USING HEAT-TRANSFER [J]. APPLIED OPTICS, 1988, 27 (01): : 109 - 113

[5] COUPLED MODE ANALYSIS OF LIGHT MODULATION IN DIELECTRIC WAVEGUIDES [J]. APPLIED PHYSICS, 1975, 5 (04): : 307 - 315

[6] OPTICAL-WAVEGUIDE MICRO-DISPLACEMENT SENSOR [J]. ELECTRONICS LETTERS, 1982, 18 (20) : 867 - 868

[7] JOHNSON LM, 1981, 3RD INT C INT OPT OP

[8] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[9] LOW-LOSS HIGH-SILICA SINGLE-MODE CHANNEL WAVE-GUIDES [J]. ELECTRONICS LETTERS, 1986, 22 (06) : 321 - 322

[10] AN INTEGRATED-OPTIC DISK PICKUP DEVICE [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1986, 4 (07) : 913 - 918

[1] [Anonymous], THEORY PLATES SHELLS

[2] Auld B., 1973, ACOUSTIC FIELDS WAVE, V1

[3] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[4] INTEGRATED-OPTIC FLUID SENSOR USING HEAT-TRANSFER [J]. APPLIED OPTICS, 1988, 27 (01): : 109 - 113

[5] COUPLED MODE ANALYSIS OF LIGHT MODULATION IN DIELECTRIC WAVEGUIDES [J]. APPLIED PHYSICS, 1975, 5 (04): : 307 - 315

[6] OPTICAL-WAVEGUIDE MICRO-DISPLACEMENT SENSOR [J]. ELECTRONICS LETTERS, 1982, 18 (20) : 867 - 868

[7] JOHNSON LM, 1981, 3RD INT C INT OPT OP

[8] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[9] LOW-LOSS HIGH-SILICA SINGLE-MODE CHANNEL WAVE-GUIDES [J]. ELECTRONICS LETTERS, 1986, 22 (06) : 321 - 322

[10] AN INTEGRATED-OPTIC DISK PICKUP DEVICE [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1986, 4 (07) : 913 - 918