THE EFFECT OF THE DEPOSITION RATE ON THE PROPERTIES OF DC-MAGNETRON-SPUTTERED NIOBIUM NITRIDE THIN-FILMS

[1] PROPERTIES OF NBN THIN-FILMS DEPOSITED ON AMBIENT-TEMPERATURE SUBSTRATES [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) : 6509 - 6516

[2] DRUCKSYNTHESE VON NIOBNITRIDEN UND KONSTITUTION VON DELTA-NBN [J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1964, 328 (1-2): : 34 - 43

[3] SUPERCONDUCTING AND STRUCTURE PROPERTIES OF NIOBIUM NITRIDE PREPARED BY RF MAGNETRON SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (07) : 2538 - 2542

[4] THE EFFECTS OF METHANE IN THE DEPOSITION OF SUPERCONDUCTING NIOBIUM NITRIDE THIN-FILMS AT AMBIENT SUBSTRATE-TEMPERATURE [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) : 1013 - 1017

[5] DEEN MJ, 1986, NRC8601 NAT RES COUN

[6] DEEN MJ, 1986, UNPUB

[7] SUPERCONDUCTING PROPERTIES OF REACTIVELY SPUTTERED NBCN THIN-FILMS [J]. IEEE TRANSACTIONS ON MAGNETICS, 1981, 17 (01) : 569 - 572

[8] AN INTEGRATION OF ALL REFRACTORY JOSEPHSON LOGIC LSI CIRCUIT [J]. IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (02) : 102 - 109

[9] Legendre J. P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V566, P321

[10] HIGH-TC SUPERCONDUCTING NBN FILMS DEPOSITED AT ROOM-TEMPERATURE [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (12) : 4643 - 4648

[1] PROPERTIES OF NBN THIN-FILMS DEPOSITED ON AMBIENT-TEMPERATURE SUBSTRATES [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) : 6509 - 6516

[2] DRUCKSYNTHESE VON NIOBNITRIDEN UND KONSTITUTION VON DELTA-NBN [J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1964, 328 (1-2): : 34 - 43

[3] SUPERCONDUCTING AND STRUCTURE PROPERTIES OF NIOBIUM NITRIDE PREPARED BY RF MAGNETRON SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (07) : 2538 - 2542

[4] THE EFFECTS OF METHANE IN THE DEPOSITION OF SUPERCONDUCTING NIOBIUM NITRIDE THIN-FILMS AT AMBIENT SUBSTRATE-TEMPERATURE [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) : 1013 - 1017

[5] DEEN MJ, 1986, NRC8601 NAT RES COUN

[6] DEEN MJ, 1986, UNPUB

[7] SUPERCONDUCTING PROPERTIES OF REACTIVELY SPUTTERED NBCN THIN-FILMS [J]. IEEE TRANSACTIONS ON MAGNETICS, 1981, 17 (01) : 569 - 572

[8] AN INTEGRATION OF ALL REFRACTORY JOSEPHSON LOGIC LSI CIRCUIT [J]. IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (02) : 102 - 109

[9] Legendre J. P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V566, P321

[10] HIGH-TC SUPERCONDUCTING NBN FILMS DEPOSITED AT ROOM-TEMPERATURE [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (12) : 4643 - 4648