ION ENERGY-DEPENDENT ELECTRICAL-PROPERTIES OF SULFUR IMPLANTS IN GAAS

被引:10
作者
YEO, YK
KWOR, R
PARK, YS
机构
[1] UNIV NOTRE DAME,DEPT ELECT ENGN,NOTRE DAME,IN 46556
[2] USAF,WRIGHT AERONAUT LABS,AVION LAB,WRIGHT PATTERSON AFB,OH 45433
关键词
D O I
10.1063/1.330593
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1812 / 1814
页数:3
相关论文
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