EFFECTS OF GRAIN-ORIENTATION ON HILLOCK FORMATION AND GRAIN-GROWTH IN ALUMINUM FILMS ON SILICON SUBSTRATES

被引：113

作者：

SANCHEZ, JE

ARZT, E

机构：

[1] Max-Planck-Institut fur Metallforschung, D-7000 Stuttgart

来源：

SCRIPTA METALLURGICA ET MATERIALIA | 1992年 / 27卷 / 03期

关键词：

D O I：

10.1016/0956-716X(92)90513-E

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

收藏

页码：285 / 290

页数：6

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