EFFECTS OF A GUARDRING UPON LOW-ENERGY SPUTTERING YIELDS OF FLAT, SINGLE-CRYSTAL GOLD TARGETS

被引：5

作者：

KREYE, WC

机构：

来源：

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D O I：

10.1063/1.1729827

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2897 / &

共 19 条

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