LATTICE DISORDER STUDIES IN LOW-TEMPERATURE NITROGEN-IMPLANTED SILICON

被引:9
作者
PRONKO, PP
MITCHELL, JB
SHEWCHUN, J
DAVIES, JA
机构
[1] MCMASTER UNIV,ENGN PHYS DEPT,HAMILTON,ONTARIO,CANADA
[2] CHALK RIVER NUCL LABS,SOLID STATE SCI BRANCH,CHALK RIVER,ONTARIO,CANADA
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1973年 / 20卷 / 04期
关键词
D O I
10.1080/00337577308232293
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
引用
收藏
页码:257 / 263
页数:7
相关论文
共 20 条
[1]   DEFECT STUDIES IN CRYSTALS BY MEANS OF CHANNELING [J].
BOGH, E .
CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :653-&
[2]  
Brice D. K., 1970, Radiation Effects, V6, P77, DOI 10.1080/00337577008235048
[3]   POST ANNEALING CONDUCTANCE BEHAVIOR OF IMPLANTED LAYERS IN SILICON [J].
DAVIES, DE .
APPLIED PHYSICS LETTERS, 1969, 14 (07) :227-&
[4]  
Eisen F. H., 1971, Radiation Effects, V7, P143, DOI 10.1080/00337577108232575
[5]  
Eisen F.H., 1972, RADIAT EFF, V13, P93, DOI [10.1080/00337577208231165, DOI 10.1080/00337577208231165]
[6]  
EISEN FH, 1973, CHANNELING, pCH14
[7]   DEPTH PROFILES OF LATTICE DISORDER RESULTING FORM ION BOMBARDMENT OF SILICON SINGLE CRYSTALS [J].
FELDMAN, LC ;
RODGERS, JW .
JOURNAL OF APPLIED PHYSICS, 1970, 41 (09) :3776-&
[8]  
FRANK WFJ, 1972, DEC INT C ION IMPL S
[9]  
MITCHELL JB, 1973, PRIVATE COMMUNICATIO
[10]  
Morehead F. F. Jr., 1970, Radiation Effects, V6, P27, DOI 10.1080/00337577008235042