BONDING OF AS AND SE TO SILICON SURFACES

被引：15

作者：

BRINGANS, RD ^{[1
]}

OLMSTEAD, MA ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT PHYS,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.584467

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1232 / 1235

页数：4

共 25 条

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