AN INVESTIGATION OF AIR-GROWN YTTRIUM-OXIDE AND EXPERIMENTAL-DETERMINATION OF THE SPUTTERING YIELD AND THE INELASTIC MEAN FREE-PATH

被引:43
作者
REICHL, R
GAUKLER, KH
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D O I
10.1016/0169-4332(86)90005-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:196 / 210
页数:15
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