INFLUENCE OF REACTIVE GASES ON SPUTTERING AND SECONDARY ION EMISSION - OXIDATION OF TITANIUM AND VANADIUM DURING ENERGETIC PARTICLE IRRADIATION

被引：50

作者：

HOFER, WO

MARTIN, PJ

机构：

来源：

APPLIED PHYSICS | 1978年 / 16卷 / 03期

关键词：

D O I：

10.1007/BF00885122

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：271 / 278

页数：8

共 27 条

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