COMPARISON OF PROPERTIES OF DIFFERENT MATERIALS USED AS MASKS FOR ION-BEAM ETCHING

被引：26

作者：

CANTAGREL, M ^{[1
]}

机构：

[1] THOMSON CSF,LAB CENT RECH,91401 ORSAY,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.568534

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1340 / 1343

页数：4

共 10 条

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[4]

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[7] EVOLUTION OF WELL-DEFINED SURFACE CONTOUR SUBMITTED TO ION-BOMBARDMENT - COMPUTER-SIMULATION AND EXPERIMENTAL INVESTIGATION [J].

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[9] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS - COMMENT [J].

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[10] FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION APPLIED TO PREDICTION OF APEX ANGLES OF CONICAL ION-BOMBARDMENT STRUCTURES [J].

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