NITRIDATION OF THE SOL-GEL DERIVED TIO2 COATING FILMS AND THE INFRARED RAY REFLECTION

被引:41
作者
KOHNO, K
机构
[1] Development Department 6, Matsushita-Kotobuki Electronics Industries Ltd, Ayauta, Kagawa, 769-02, 2419, Utazu
关键词
D O I
10.1007/BF02403875
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The titanium nitride coating film was prepared on the SiO2 glass substrate by ammonolysis of titanium dioxide coating film formed by sol-gel method. The X-ray diffraction (XRD) pattern indicated that it is cubic titanium nitride with a lattice parameter, a(o), of 0.4231 nm. The obtained titanium nitride is non-stoichiometric (TiN(x) x less-than-or-equal-to 1) because the value, 0.4231 nm, is smaller than the stoichiometric one (0.4240 nm). The coating film show very high infrared (i.r.) reflectance in the wavelength region of 2-8-mu-m.
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页码:658 / 660
页数:3
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