CHEMISTRY OF ATOMIC SILICON .3. REACTIONS OF ELECTRON-BOMBARDMENT PRODUCED SILICON VAPOR WITH SILANES

被引：25

作者：

SKELL, PS

OWEN, PW

机构：

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 1972年 / 94卷 / 15期

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D O I：

10.1021/ja00770a046

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

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页码：5434 / &

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