LARGE-AREA ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE WITH PERMANENT-MAGNETS

被引：20

作者：

SHIDA, N

INOUE, T

KOKAI, H

SAKAMOTO, Y

MIYAZAWA, W

DEN, S

HAYASHI, Y

机构：

[1] NICHIMEN ELECTR TECHNOL CORP,SAITAMA 356,JAPAN

[2] IRIE KOKEN CO LTD,RES & DEV LAB,KAWAGOE,SAITAMA 356,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1993年 / 32卷 / 11A期

关键词：

ECR; PERMANENT MAGNETS; GRAD B DRIFT; CURVATURE DRIFT; SLOTTED ARRAY ANTENNA; WHISTLER-MODE LAUNCHING;

D O I：

10.1143/JJAP.32.L1635

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A large-area electron cyclotron resonance (ECR) plasma is generated by using permanent magnets and applying the whistler-mode launching of microwaves. A uniform plasma is produced with the uniformity of +/- 3.5% over 20 cm and +/- 1.8% over 16 cm in diameter; the plasma space potential is about 17 V with the uniformity of +/- 1% over 20 cm. The maximum ion current density is about 11.5 mA .cm-2. The purity of the produced plasma is high. No damage was found after the operation for 100 h with the microwave power of 600 W.

引用

页码：L1635 / L1637

页数：3

共 6 条

[1] PLASMA IONIZATION BY HELICON WAVES [J].