UNIFORM PLASMA PRODUCED BY A PLANE SLOTTED ANTENNA WITH MAGNETS FOR ELECTRON-CYCLOTRON RESONANCE

被引：50

作者：

SATO, N ^{[1
]}

IIZUKA, S ^{[1
]}

NAKAGAWA, Y ^{[1
]}

TSUKADA, T ^{[1
]}

机构：

[1] TOHOKU UNIV,DEPT ELECTR ENGN,SENDAI,MIYAGI 980,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 13期

关键词：

D O I：

10.1063/1.108661

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A uniform plasma is produced by a new plane slotted antenna with permanent magnets for the electron cyclotron resonance. The plasma is uniform within a few percent in a diameter of 25-30 cm at a distance of 25-30 cm from the antenna. The plasma density, 1.5 X 10(10) cm-3 with electron temperature of 1.8 eV at a microwave power of 100 W, is almost proportional to the microwave power. A magnetic distribution provided by the magnets is essential for producing such a uniform plasma.

引用

页码：1469 / 1471

页数：3

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