MICROWAVE MULTIPOLAR PLASMAS EXCITED BY DISTRIBUTED ELECTRON-CYCLOTRON RESONANCE - CONCEPT AND PERFORMANCE

被引：110

作者：

PICHOT, M ^{[1
]}

DURANDET, A ^{[1
]}

PELLETIER, J ^{[1
]}

ARNAL, Y ^{[1
]}

VALLIER, L ^{[1
]}

机构：

[1] UNIV J FOURIER,CNRS,UA 844,CTR NACL ETUD TELECOMMUN,CNS,F-38243 MEYLAN,FRANCE

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1988年 / 59卷 / 07期

关键词：

D O I：

10.1063/1.1139728

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1072 / 1075

页数：4

共 22 条

[1] PLASMA-ETCHING IN MAGNETIC MULTIPOLE MICROWAVE-DISCHARGE
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[J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 132 - 134
[2] PRIMARY ELECTRON REFLECTIONS IN DISCHARGES SURROUNDED BY MAGNETIC MULTIPOLE WALLS
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[3] DEPENDENCE OF F-ATOM DENSITY ON PRESSURE AND FLOW-RATE IN CF4 GLOW-DISCHARGES AS DETERMINED BY EMISSION-SPECTROSCOPY
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 353 - 356
[4] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE
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DEROSNY, G
SCHMITT, JPM
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 646 - 648
[5] DREVILLON B, 1982, VIDE COUCHES MINCE S, V212, P37
[6] PLASMA-DENSITY PROFILES IN DISCHARGES SURROUNDED BY MAGNETIC MULTIPOLE WALLS
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[J]. PHYSICS LETTERS A, 1984, 102 (5-6) : 231 - 234
[7] PRIMARY ELECTRON TRAJECTORIES IN A MULTIPOLAR DISCHARGE
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[J]. JOURNAL DE PHYSIQUE, 1984, 45 (07): : 1113 - 1123
[8] NEW HIGH INTENSITY ION SOURCE WITH VERY LOW EXTRACTION VOLTAGE
GELLER, R
[J]. APPLIED PHYSICS LETTERS, 1970, 16 (10) : 401 - &
[9] OXIDATION OF GAAS IN AN OXYGEN MULTIPOLE PLASMA
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BACAL, M
[J]. THIN SOLID FILMS, 1980, 65 (03) : 315 - 330
[10] COLLISIONAL DIFFUSION OF A PLASMA IN MULTIPOLAR AND PICKET FENCE DEVICES
KOCH, C
MATTHIEUSSENT, G
[J]. PHYSICS OF FLUIDS, 1983, 26 (02) : 545 - 555

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