DEPENDENCE OF F-ATOM DENSITY ON PRESSURE AND FLOW-RATE IN CF4 GLOW-DISCHARGES AS DETERMINED BY EMISSION-SPECTROSCOPY

被引：81

作者：

COBURN, JW

CHEN, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

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D O I：

10.1116/1.570781

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：353 / 356

页数：4

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