SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE

被引：82

作者：

DREVILLON, B ^{[1
]}

HUC, J ^{[1
]}

LLORET, A ^{[1
]}

PERRIN, J ^{[1
]}

DEROSNY, G ^{[1
]}

SCHMITT, JPM ^{[1
]}

机构：

[1] ECOLE POLYTECH,PHYS MILIEUX IONISES LAB,F-91128 PALAISEAU,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 07期

关键词：

D O I：

10.1063/1.92008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：646 / 648

页数：3

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