INFLUENCE OF INTERFACE CHARGES ON TRANSPORT MEASUREMENTS IN AMORPHOUS SILICON FILMS

被引:147
作者
SOLOMON, I [1 ]
DIETL, T [1 ]
KAPLAN, D [1 ]
机构
[1] THOMSON CSF,LCR,F-91401 ORSAY,FRANCE
来源
JOURNAL DE PHYSIQUE | 1978年 / 39卷 / 11期
关键词
D O I
10.1051/jphys:0197800390110124100
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学科分类号
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页码:1241 / 1246
页数:6
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[1]   PHOTOCONDUCTIVITY AND RECOMBINATION IN DOPED AMORPHOUS SILICON [J].
ANDERSON, DA ;
SPEAR, WE .
PHILOSOPHICAL MAGAZINE, 1977, 36 (03) :695-712
[2]  
BIEGELSEN DK, 1977, 7TH P INT C AM LIQ S, P429
[3]  
BOURDON B, 1977, 6TH P INT C CHEM VAP, P220
[4]   PREPARATION AND PROPERTIES OF AMORPHOUS SILICON [J].
CHITTICK, RC ;
ALEXANDE.JH ;
STERLING, HF .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (01) :77-&
[5]  
FRIEDERICH A, UNPUBLISHED
[6]   HYDROGENATION OF EVAPORATED AMORPHOUS SILICON FILMS BY PLASMA TREATMENT [J].
KAPLAN, D ;
SOL, N ;
VELASCO, G ;
THOMAS, PA .
APPLIED PHYSICS LETTERS, 1978, 33 (05) :440-442
[7]  
MADAN A, 1977, 7TH P INT C AM LIQ S, P377
[8]   ELECTRICAL-PROPERTIES OF SI-SIO2 INTERFACE AND ITS INFLUENCE ON DEVICE PERFORMANCE AND STABILITY [J].
NICOLLIAN, EH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (05) :1112-1121
[9]   DOPING, SCHOTTKY-BARRIER AND P-N-JUNCTION FORMATION IN AMORPHOUS-GERMANIUM AND SILICON BY RF SPUTTERING [J].
PAUL, W ;
LEWIS, AJ ;
CONNELL, GAN ;
MOUSTAKAS, TD .
SOLID STATE COMMUNICATIONS, 1976, 20 (10) :969-972
[10]   SPIN-DEPENDENT PHOTOCONDUCTIVITY IN N-TYPE AND P-TYPE AMORPHOUS SILICON [J].
SOLOMON, I ;
BIEGELSEN, D ;
KNIGHTS, JC .
SOLID STATE COMMUNICATIONS, 1977, 22 (08) :505-508