OXIDATION OF GAAS IN AN OXYGEN MULTIPOLE PLASMA

被引：33

作者：

GOURRIER, S ^{[1
]}

MIRCEA, A ^{[1
]}

BACAL, M ^{[1
]}

机构：

[1] ECOLE POLYTECH, F-91128 PALAISEAU, FRANCE

来源：

THIN SOLID FILMS | 1980年 / 65卷 / 03期

关键词：

D O I：

10.1016/0040-6090(80)90242-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：315 / 330

页数：16

共 35 条

[1] OPTICAL-PROPERTIES OF ANODICALLY GROWN NATIVE OXIDES ON SOME GA-V COMPOUNDS FROM 1.5 TO 6.0 EV
ASPNES, DE
SCHWARTZ, B
STUDNA, AA
DERICK, L
KOSZI, LA
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3510 - 3513
[2] ANODIC OXIDE ON GAAS - QUANTITATIVE CHEMICAL DEPTH PROFILES OBTAINED USING AUGER-SPECTROSCOPY AND NEUTRON-ACTIVATION ANALYSIS
CHANG, CC
SCHWARTZ, B
MURARKA, SP
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (06) : 922 - 926
[3] PLASMA-GROWN OXIDE ON GAAS - SEMI-QUANTITATIVE CHEMICAL DEPTH PROFILES OBTAINED USING AUGER-SPECTROSCOPY AND NEUTRON-ACTIVATION ANALYSIS
CHANG, CC
CHANG, RPH
MURARKA, SP
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : 481 - 487
[4] PLASMA OXIDATION OF GAAS
CHANG, RPH
SINHA, AK
[J]. APPLIED PHYSICS LETTERS, 1976, 29 (01) : 56 - 58
[5] PLASMA OXIDATION OF ALUMINUM FILM ON GAAS - STUDY BY AUGER-SPECTROSCOPY AND TRANSMISSION ELECTRON-MICROSCOPY
CHANG, RPH
CHANG, CC
SHENG, TT
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (12) : 657 - 659
[6] MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING
CHANG, RPH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 278 - 280
[7] NEW METHOD OF FABRICATING GALLIUM-ARSENIDE MOS DEVICES
CHANG, RPH
COLEMAN, JJ
[J]. APPLIED PHYSICS LETTERS, 1978, 32 (05) : 332 - 333
[8] EFFECT OF INTERFACE ARSENIC DOMAINS ON ELECTRICAL-PROPERTIES OF GAAS MOS STRUCTURES
CHANG, RPH
SHENG, TT
CHANG, CC
COLEMAN, JJ
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (04) : 341 - 342
[9] DC PLASMA ANODIZATION OF GAAS
CHESLER, LA
ROBINSON, GY
[J]. APPLIED PHYSICS LETTERS, 1978, 32 (01) : 60 - 62
[10] PLASMA ANODIZATION OF GAAS IN A DC DISCHARGE
CHESLER, LA
ROBINSON, GY
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (04): : 1525 - 1529

← 1 2 3 4 →