PLASMA ANODIZATION OF GAAS IN A DC DISCHARGE

被引：19

作者：

CHESLER, LA

ROBINSON, GY

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 04期

关键词：

D O I：

10.1116/1.569781

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1525 / 1529

页数：5

相关论文

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