DIFLUOROCARBENE EMISSION-SPECTRA FROM FLUOROCARBON PLASMAS AND ITS RELATIONSHIP TO FLUOROCARBON POLYMER FORMATION

被引：73

作者：

MILLARD, MM

KAY, E

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 01期

关键词：

D O I：

10.1149/1.2123747

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：160 / 165

页数：6

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