GROWTH OF SINGLE-CRYSTAL AND POLYCRYSTALLINE INSULATING FLUORIDE FILMS ON SEMICONDUCTORS BY MOLECULAR-BEAM EPITAXY

被引:32
作者
SULLIVAN, PW
COX, TI
FARROW, RFC
JONES, GR
GASSON, DB
SMITH, CS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期
关键词
D O I
10.1116/1.571441
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:731 / 732
页数:2
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    SULLIVAN, PW
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    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03): : 415 - 420
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    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (17) : 2436 - 2448
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    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (10) : L117 - &
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