MBE-GROWN FLUORIDE FILMS - A NEW CLASS OF EPITAXIAL DIELECTRICS

被引：169

作者：

FARROW, RFC

SULLIVAN, PW

WILLIAMS, GM

JONES, GR

CAMERON, DC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571030

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：415 / 420

页数：6

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