CHARACTERIZATION OF MAGNETRON-SPUTTERED DIAMOND-LIKE THIN-FILMS FOR OPTICAL COATINGS IN IR

被引：4

作者：

CLARKE, GA

PARSONS, RR

机构：

[1] Department of Physics, The University of British Columbia, Vancouver

来源：

THIN SOLID FILMS | 1993年 / 236卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(93)90644-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructural, optical, mechanical and electrical properties of diamond-like carbon films prepared by d.c. magnetron sputtering have been investigated as a function of argon pressure and substrate bias. The films were characterized by spectroscopic ellipsometry, scanning and transmission electron microscopy, electron diffraction, resistivity and hardness measurements. The pseudoband gap was found to rise and the hardness decrease with increasing pressure. Ellipsometric modelling indicated a change in the bonding configuration under the above conditions. This effect does not appear to be the result of a change in the energetics of the bombarding ions. Increasing substrate bias resulted in a densification of the films.

引用

页码：67 / 71

页数：5

共 21 条

[1]

AHN J, 1987, ADHESION MEASUREMENT, P138

[2]

Alterovitz S.A., 1991, HDB OPTICAL CONSTANT, VII, P837

[3] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].