BONDING OF FLUORINE IN AMORPHOUS HYDROGENATED SILICON

被引：94

作者：

FANG, CJ

LEY, L

SHANKS, HR

GRUNTZ, KJ

CARDONA, M

机构：

来源：

PHYSICAL REVIEW B | 1980年 / 22卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.22.6140

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：6140 / 6148

页数：9

共 23 条

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