X-RAY-DIFFRACTION AND X-RAY-ABSORPTION STUDIES OF POROUS SILICON, SILOXENE, HEAT-TREATED SILOXENE, AND LAYERED POLYSILANE

被引:46
作者
DAHN, JR
WAY, BM
FULLER, EW
WEYDANZ, WJ
TSE, JS
KLUG, DD
VANBUUREN, T
TIEDJE, T
机构
[1] NATL RES COUNCIL CANADA,STEACIE INST MOLEC SCI,OTTAWA K1A 0R6,ONTARIO,CANADA
[2] UNIV BRITISH COLUMBIA,DEPT PHYS,VANCOUVER V6T 1Z1,BC,CANADA
关键词
D O I
10.1063/1.356342
中图分类号
O59 [应用物理学];
学科分类号
摘要
Several porous silicon, siloxene (Si6H6O3), heat-treated siloxene, and layered polysilane (Si6H6) samples have been studied with K- and L-edge x-ray photoabsorption, photoemission, and powder x-ray diffraction. The x-ray absorption of layered polysilane and porous-Si are found to be remarkably similar. In particular, the K absorption edges of these samples shift by about 0.4-0.6 eV to higher energy relative to crystalline silicon. Siloxene samples heated to 400-degrees-C in inert gas are best described as a mixture of SiO2 and amorphous-Si. When heat-treated siloxene is studied by photoelectron spectroscopy (surface sensitive) it resembles SiO2, when it is studied by x-ray absorption (bulk and surface) features from both SiO2 and amorphous-Si are observed and when it is studied by x-ray diffraction (bulk measurement) it resembles amorphous-Si. The SiO2 is therefore predominantly at the surface and heat-treated siloxene is very small amorphous-Si particles coated with SiO2. The Si L edge of heat-treated siloxene is not shifted significantly with respect to crystalline Si, unlike that of porous-Si, as-prepared siloxene, or layered polysilane. Taken together, these results suggest that heat-treated siloxene does not resemble electrochemically prepared porous-Si but that it might resemble rapid thermal annealed porous-Si. On the other hand, we believe that layered polysilane and unheated porous-Si may be related.
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页码:1946 / 1951
页数:6
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