GAN, AIN, AND INN - A REVIEW

被引:2712
作者
STRITE, S [1 ]
MORKOC, H [1 ]
机构
[1] UNIV ILLINOIS, COORDINATED SCI LAB, URBANA, IL 61801 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.585897
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The status of research on both wurtzite and zinc-blende GaN, A1N, and InN and their alloys is reviewed including exciting recent results. Attention is paid to the crystal growth techniques, structural, optical and electrical properties of GaN, A1N, InN, and their alloys. The various theoretical results for each material are summarized. We also describe the performance of several device structures which have been demonstrated in these materials. Near-term goals and critical areas in need of further research in the III-V nitride material system are identified.
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页码:1237 / 1266
页数:30
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