共 3 条
[1]
ISHIKAWA I, 1989, 19TH P INT C PHEN IO, P404
[3]
ASYMMETRICAL EMISSION PROFILES FROM LOW-FREQUENCY DISCHARGES IN SF6 AND IN N2 GASES IN A PLANAR DIODE WITH A SI-WAFER
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1991, 30 (01)
:180-181