PLASMA-DEVELOPED X-RAY RESISTS

[11] KOSAR J, 1965, LIGHT SENSITIVE SYST, P143

[12] LAIBOWITZ RB, 1978, B AM PHYS SOC, V23, P357

[13] MALDONADO JR, UNPUBLISHED

[14] MAYDAN D, UNPUBLISHED

[15] MOGAB CJ, 1977, J ELCHEM SO, V124, P1260

[16] HIGH-RESOLUTION, STEEP PROFILE, RESIST PATTERNS [J]. BELL SYSTEM TECHNICAL JOURNAL, 1979, 58 (05): : 1027 - 1036

[17] MORAN JM, UNPUBLISHED

[18] STUDY ON DISSOLUTION RATE OF IRRADIATED POLY(METHYL METHACRYLATE) [J]. POLYMER ENGINEERING AND SCIENCE, 1978, 18 (04) : 306 - 313

[19] REICHELDERFER RF, 1977, J ELCHEM SO, V124, P1924

[20] RADIATION CROSSLINKING OF POLYVINYL-CHLORIDE) [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1972, 16 (03) : 671 - &

[11] KOSAR J, 1965, LIGHT SENSITIVE SYST, P143

[12] LAIBOWITZ RB, 1978, B AM PHYS SOC, V23, P357

[13] MALDONADO JR, UNPUBLISHED

[14] MAYDAN D, UNPUBLISHED

[15] MOGAB CJ, 1977, J ELCHEM SO, V124, P1260

[16] HIGH-RESOLUTION, STEEP PROFILE, RESIST PATTERNS [J]. BELL SYSTEM TECHNICAL JOURNAL, 1979, 58 (05): : 1027 - 1036

[17] MORAN JM, UNPUBLISHED

[18] STUDY ON DISSOLUTION RATE OF IRRADIATED POLY(METHYL METHACRYLATE) [J]. POLYMER ENGINEERING AND SCIENCE, 1978, 18 (04) : 306 - 313

[19] REICHELDERFER RF, 1977, J ELCHEM SO, V124, P1924

[20] RADIATION CROSSLINKING OF POLYVINYL-CHLORIDE) [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1972, 16 (03) : 671 - &