GAS-PHASE REACTIONS OF SF-5, SF-2, AND SOF WITH O(P-3) - THEIR SIGNIFICANCE IN PLASMA PROCESSING

被引：39

作者：

PLUMB, IC

RYAN, KR

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1986年 / 6卷 / 03期

关键词：

D O I：

10.1007/BF00575131

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：247 / 258

页数：12

共 12 条

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[8]

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