USE OF A QUARTZ CRYSTAL MICROBALANCE TO STUDY OXIDATION OF ALUMINIUM DURING VACUUM DEPOSITION

被引：5

作者：

FRIDRICH, J

机构：

来源：

THIN SOLID FILMS | 1971年 / 7卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(71)90074-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：277 / &

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