DESIGN OF A SPECTROSCOPIC LOW-ENERGY ELECTRON-MICROSCOPE

被引:61
作者
VENEKLASEN, LH [1 ]
机构
[1] TECH UNIV CLAUSTHAL,INST PHYS,W-3392 CLAUSTHAL ZELLERFE,GERMANY
关键词
D O I
10.1016/0304-3991(91)90139-W
中图分类号
TH742 [显微镜];
学科分类号
摘要
The instrumental design aspects of a spectroscopic low-energy electron microscope for the direct imaging of chemical, topographic and structural features on surfaces are presented. This instrument extends the LEEM concept to include energy-resolved imaging of secondary, Auger and X-ray emissions with enhanced resolution and collection efficiency. Key new elements include a triode magnetic cathode lens, a prism array separator magnet, a decelerating hemispherical energy analyzer, and a high-quantum-efficiency intensifier. Mathematical techniques for the optimization of viewing conditions are reviewed, and the goals of pending performance tests are given.
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页码:76 / 90
页数:15
相关论文
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