ELECTRON-CYCLOTRON RESONANCE MICROWAVE DISCHARGES FOR ETCHING AND THIN-FILM DEPOSITION

[1] ARD WB, 1963, PHYS REV LETT, V10, P89

[2] DESIGN OF A MICROWAVE PLASMA CAVITY [J]. PROCEEDINGS OF THE IEEE, 1974, 62 (01) : 109 - 117

[3] THE EXPERIMENTAL TEST OF A MICROWAVE ION-BEAM SOURCE IN OXYGEN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 328 - 331

[4] Babat G.I., 1947, J I ELECT ENG 3, V94, P27, DOI [10.1049/ji-3-2.1947.0005, DOI 10.1049/JI-3-2.1947.0005]

[5] BURKE RR, 1988, SOLID STATE TECHNOL, P64

[6] CHERRINGTON BE, 1979, GASEOUS ELECTRONIC G

[7] THE PERFORMANCE OF A MICROWAVE ION-SOURCE IMMERSED IN A MULTICUSP STATIC MAGNETIC-FIELD [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 126 - 130

[8] RETUNING AND HYSTERESIS EFFECTS OF A RF PLASMA IN A VARIABLE SIZE MICROWAVE CAVITY [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (09) : 3647 - +

[9] GELLER R, 1979, IEEE T NUCL SCI, V26, P2120

[10] RETUNING EFFECTS AND DYNAMIC INSTABILITY OF A RADIO-FREQUENCY CAPACITIVE DISCHARGE [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (04) : 1701 - +

[1] ARD WB, 1963, PHYS REV LETT, V10, P89

[2] DESIGN OF A MICROWAVE PLASMA CAVITY [J]. PROCEEDINGS OF THE IEEE, 1974, 62 (01) : 109 - 117

[3] THE EXPERIMENTAL TEST OF A MICROWAVE ION-BEAM SOURCE IN OXYGEN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 328 - 331

[4] Babat G.I., 1947, J I ELECT ENG 3, V94, P27, DOI [10.1049/ji-3-2.1947.0005, DOI 10.1049/JI-3-2.1947.0005]

[5] BURKE RR, 1988, SOLID STATE TECHNOL, P64

[6] CHERRINGTON BE, 1979, GASEOUS ELECTRONIC G

[7] THE PERFORMANCE OF A MICROWAVE ION-SOURCE IMMERSED IN A MULTICUSP STATIC MAGNETIC-FIELD [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 126 - 130

[8] RETUNING AND HYSTERESIS EFFECTS OF A RF PLASMA IN A VARIABLE SIZE MICROWAVE CAVITY [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (09) : 3647 - +

[9] GELLER R, 1979, IEEE T NUCL SCI, V26, P2120

[10] RETUNING EFFECTS AND DYNAMIC INSTABILITY OF A RADIO-FREQUENCY CAPACITIVE DISCHARGE [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (04) : 1701 - +