NONLINEAR PHENOMENA IN HYDROGEN IMPLANTATION INTO (100) SILICON

被引：6

作者：

CEROFOLINI, GF

MEDA, L

VOLPONES, C

DIERCKX, R

MERCURIO, G

ANDERLE, M

CANTERI, R

CEMBALI, F

FABBRI, R

SERVIDORI, M

机构：

[1] SGS THOMSON MICROELECTR,I-20041 AGRATE,ITALY

[2] EEC JOINT RES CTR,I-21020 ISPRA,ITALY

[3] IST RIC SCI & TECHNOL,I-38050 POVO,ITALY

[4] IST LAMEL,I-40126 BOLOGNA,ITALY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90735-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：26 / 29

页数：4

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ANDERLE, M ;

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