A MODEL TO CALCULATE THE TEMPERATURE INDUCED BY A LASER

被引:21
作者
GARRIDO, C [1 ]
LEON, B [1 ]
PEREZAMOR, M [1 ]
机构
[1] UNIV VIGO,DEPT APPL PHYS,E-36280 VIGO,SPAIN
关键词
D O I
10.1063/1.347293
中图分类号
O59 [应用物理学];
学科分类号
摘要
Numerical models to calculate temperature distributions during laser chemical vapor deposition (LCVD) of spots and during the direct writing of lines are presented. The temperature variation of the thermal conductivities of the substrate and the deposit are taken into account in both models. Results are used to study the LCVD deposition of platinum spots and lines on Pyrex glass substrates.
引用
收藏
页码:1133 / 1140
页数:8
相关论文
共 28 条
[1]   TRANSIENT NONLINEAR LASER-HEATING AND DEPOSITION - A COMPARISON OF THEORY AND EXPERIMENT [J].
ALLEN, SD ;
GOLDSTONE, JA ;
STONE, JP ;
JAN, RY .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) :1653-1657
[2]  
BAUERLE D, 1986, CHEM PROCESSING LASE
[3]  
Bauerle Dieter W., 1984, LASER PROCESSING DIA, P166
[4]  
BELL AE, 1979, RCA REV, V40, P295
[5]   TEMPERATURE DISTRIBUTIONS PRODUCED IN A 2-LAYER STRUCTURE BY A SCANNING CW LASER OR ELECTRON-BEAM [J].
BURGENER, ML ;
REEDY, RE .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :4357-4363
[6]   MODELING OF CW LASER ANNEALING OF MULTILAYER STRUCTURES [J].
CALDER, ID ;
SUE, R .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) :7545-7550
[7]   HEAT TREATING AND MELTING MATERIAL WITH A SCANNING LASER OR ELECTRON-BEAM [J].
CLINE, HE ;
ANTHONY, TR .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (09) :3895-3900
[9]   HEATING A SLAB INDUCED BY A TIME-DEPENDENT LASER IRRADIANCE - AN EXACT SOLUTION [J].
ELADAWI, MK ;
ELSHEHAWEY, EF .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (07) :2250-2255
[10]  
EUVRARD D, 1988, RESOLUTION NUMERIQUE